平面碳傳感器電導率計
HE-960LF/FS-09F-1/2平面碳傳感器電導率計有效保持恒定的研磨液稀釋度。保持適當的電導率值有助于保持晶圓拋光制程中的工藝穩定性。即使是高粘度樣品液體（如 CMP 研磨液）也可以正常測量，因為其使用的傳感器結構降低了樣品液體附著在電極上的風險。同時，傳感器由具有良好耐化學性的接液材料制成，符合半導體制程的清潔度要求。此外，它還可以用于半導體制程開發階段的引入和特殊化學藥液的電導率控制。
高精度/高穩定性
測量范圍：0 至 2,000 μS/cm, 0 至 10,000 μS/cm
重復性：± 0.5% F.S.，± 1.0% F.S.
無金屬污染
由于電極材料采用特殊碳制成，因此無需擔心金屬洗脫污染問題。
配備濃度換算功能
通過輸入化學藥液濃度和電導率之間的關系以及溫度特性，可實現兩種不同類型的濃度換算。
特別適用于低濃度化學品的稀釋控制。
節省空間
通過縮小傳統電導率傳感器的尺寸，提高了安裝布局的自由度。
安裝式例
HE-960LF/FS-09F-1/2平面碳傳感器電導率計規格
| Product name | Conductivity meter | |||
|---|---|---|---|---|
| Model | HE-960LF | |||
| Measurement method | Electrode type（2-electrode method） | |||
| Temperature specifications sensor | Platinum resistance 1000Ω/℃ | |||
| Measurement range | Cell constant | 0.1/cm | 1.0/cm | |
| Conductivity | 0.00 to 20.00μS/cm | 0.0 to 200.0μS/cm | ||
| 0.0 to 200.0μS/cm | 0 to 2000μS/cm | |||
| 0 to 1000μS/cm | 0 to 10000μS/cm | |||
| ＊Measuring range of raw conductivity Switched with setting change | ||||
| Temperature | 0 to 100℃ Actual temperature measuring range depend on the performance of the sensor connected. | |||
| Concentration conversion | Option 1,2 | 0 to 10.000% Conversion formula is defined by user (temperature compensation and concentration conversion) | ||
| Repeatability | Cell constant | 0.1/cm | 1.0/cm | |
| Conductivity | 0.00 to 20.00μS/cm range | 0.0 to 200.0μS/cm range | Within ±0.5% full scale | |
| 0.0 to 200.0μS/cm range | 0 to 2000μS/cm range | |||
| 0 to 1000μS/cm range | 0 to 10000μS/cm range | Within ±1.0% full scale | ||
| Temperature | ±0.5℃ | |||
| Condition | Equivalent input | |||
| Linearity | Cell constant | 0.1/cm | 1.0/cm | |
| Conductivity | 0.00 to 20.00μS/cm range | 0.0 to 200.0μS/cm range | Within ±0.5% full scale | |
| 0.0 to 200.0μS/cm range | 0 to 2000μS/cm range | |||
| 0 to 1000μS/cm range | 0 to 10000μS/cm range | Within ±1.0% full scale | ||
| Temperature | ±0.5℃ | |||
| Condition | Equivalent input | |||
| Transmission output | Number of output：4 DC4 to 20mA / 0 to 20mA input/output isolated type Maximum load resistance : 900Ω Transmission output range : Free setting within measuring range (Negative terminals of each transmission output channel are connected inside and thus have the same electrical potential.) | |||
| Contact output | Number of relay：5 ALARM contact R1,R2,R3 and R4 Contact type relay : Relay contact, SPST (1a） Contact rating：240 V AC,1 A or 30 V DC, 1 A(resistance load) Contact function Upper or lower ON/OFF alarm each measurement items. Contact action Closed when status is in the event. Opened when any erroneous status is normal or power is down. R1,R2 and R3 share a common terminal. Self diagnosis contact RF Contact type : relay contact , SPDT (1c) Contact rating：240 V AC,1 A or 30 V DC, 1 A(resistance load) C-NO contact action : Closed when status is normal. Opened when any erroneous status is detected or power is down. R4 and RF share a common terminal. | |||
| Contact input | Number of input：1 | |||
| Contact type：open collector. No-voltage contact | ||||
| Function : Hold command | ||||
| Communication output | RS-485 communication | |||
| Self-check | Sensor diagnosis (Short-circuit and disconnection of the temperature sensor). Converter error | |||
| Temperature compensation of conductivity | ● Arbitrary temperature coefficient entry (reference temperature : 25℃, temperature coefficient : 0%/℃ to 5%/℃） ● Arbitrary temperature compensation formula entry (reference temperature : 25℃, formula is defined by user) ● No temperature compensation is performed. | |||
| Temperature compensation range | 0 to 100℃ The temperature compensation under 0℃ and over 100℃ is expanded by a function | |||
| Ambient temperature | 5 to 45℃ | |||
| Relative humidity | －25 to 65℃ | |||
| Power supply | Rated voltage 24 V DC, 10W (max.) | |||
| Structure | Indoor-use panel installation type Panel case ： ABS, terminal : PBT Panel : IP65 dust and water proof structure | |||
| Conforming standards | CE Marking | EMC Directive : EN61326-2-3 | ||
| FCC Rule | FCC Part15 | |||
| Mass | Approx. 550g | |||
| External dimensions | 96 (W) × 96 (H) × 115 (D) mm Case depth : approx. 105mm (when panel-mounted） | |||
| Compatible sensors | FS-09F-1/2 | |||
上海默威生物科技有限公司一直專注于水質分析儀、生物化學、生命科學儀器與環境監測儀器的研發生產銷售等一體式服務公司。公司擁有自主“MOWEAL"品牌，主要生產產品覆蓋水質分析儀、環境監測儀、生命科學儀器等領域，能隨時為廣大用戶提供全程貼心服務，并能提供完善的產品組合和方案。公司主營產品：PH計/酸度計、電導率測定儀、溶解氧測定儀、化學需氧量COD/生化需氧量BOD快速測定儀、紫外可見分光光度計、噪音計、紫外線燈、紫外交聯儀、實驗室分析儀器等等。
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